JPS6445162U - - Google Patents
Info
- Publication number
- JPS6445162U JPS6445162U JP13534487U JP13534487U JPS6445162U JP S6445162 U JPS6445162 U JP S6445162U JP 13534487 U JP13534487 U JP 13534487U JP 13534487 U JP13534487 U JP 13534487U JP S6445162 U JPS6445162 U JP S6445162U
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- sample
- plasma
- insulating material
- grounded
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000011810 insulating material Substances 0.000 claims description 4
- 238000009832 plasma treatment Methods 0.000 claims 1
- 239000012212 insulator Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Or Chemical Processes And Apparatus (AREA)
- Chemical Vapour Deposition (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13534487U JPS6445162U (en]) | 1987-09-04 | 1987-09-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13534487U JPS6445162U (en]) | 1987-09-04 | 1987-09-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6445162U true JPS6445162U (en]) | 1989-03-17 |
Family
ID=31394883
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13534487U Pending JPS6445162U (en]) | 1987-09-04 | 1987-09-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6445162U (en]) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7402471B2 (en) | 1993-12-22 | 2008-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
| US7507991B2 (en) | 1991-06-19 | 2009-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and thin film transistor and method for forming the same |
-
1987
- 1987-09-04 JP JP13534487U patent/JPS6445162U/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7507991B2 (en) | 1991-06-19 | 2009-03-24 | Semiconductor Energy Laboratory Co., Ltd. | Electro-optical device and thin film transistor and method for forming the same |
| US7402471B2 (en) | 1993-12-22 | 2008-07-22 | Semiconductor Energy Laboratory Co., Ltd. | Semiconductor device and method for manufacturing the same |
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